In etching, system board, clean or with corrosive chemical fluid in the polishing process, the quality of the product depends largely on the quality of chemical liquid, liquid pump is one of the key links. Chemical liquid such as acid, organic solvent corrosion, reliable transmission pump must be free from contamination, and to pump has corrosion resistance and resistance to a certain temperature ac induction motor requirements. Most traditional pneumatic and chip pump life is short, only about 100 ℃, the highest of heat-resistant movement valve and chip still produces a small amount of particles, liquid transmission there are uneven pulse, influence the process quality. Use the bearingless motor seal pump can solve the defects existing in the traditional transmission, greatly satisfy the precision semiconductor device production process requirement. At present, the power of 300 w of the bearingless motor seal pump is applied in the semiconductor industry. The bearingless motor is according to the principle of magnetic bearing and motor to produce electromagnetic force, the magnetic bearings in radial force windings is installed on the motor stator, through the decoupling control of the motor torque and radial levitation force of independent control. motor part Bearingless motor installation method had many advantages, such as magnetic levitation magnetic bearing all need maintenance free, long running life, sterile, www.dongfeng-motor.com no pollution, and the transmission of the poisonous and harmful liquid or gas are typical applications the bearingless motor. Received the following application now.
Chemical field radioactive environment or under bad conditions, such as high temperature radiation environment, use three-phase asynchronous motor seal pump for waste treatment, can solve the problem of mechanical bearing wear and maintenance. In the chemical industry, the need for effective seal transfer and production system, further improve the traditional seal of pump shaft seal, mechanical bearing need lubrication, it is reported that 80% % of the fault is caused by the seal failure, is 20% %, connection and other bearing fault. For safety production, from environmental pollution, the use of the bearingless motor seal pump is the best choice. Currently, the federal institute of technology in Zurich and Sulzer pump company completed the power of 30 kw without bearing seal pump prototype development and testing, has entered trial operation stage. The heart is a perpetual motion machine of life, in the event of failure is difficult to repair. The use of artificial heart replace cardiac function in whole or in part be heart disease patients life extension of the Gospel. Use of mechanical bearing pump will produce friction and heat, make the blood cell damage, cause hemolysis, blood clotting and thrombosis, and even endanger the patient lives. The federal institute of technology in Zurich and Levitronix company successfully developed the bearingless permanent magnet motor driven pump and can be transplanted into the body to the heart of left ventricular assist device has been applied in clinical.
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